Hirokazu Sasaki, Jun Uzuhasi, Takeyoshi Matsuda, Tadakatsu Ohkubo
Abstract
Three-dimensional atom probes were used to analyze dopants in compound semiconductors and precipitates in copper alloys. In the analysis of semiconductors, this method enables us to visualize dopant distribution on a nanoscale. In the analysis of copper alloys, the shape, size, and composition of precipitates of several nanometers can be analyzed in three dimensions.
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